Fingerprint
Dive into the research topics of 'A comparison between PECVD and ALD for the fabrication of slot-waveguide-based sensors'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
A comparison between PECVD and ALD for the fabrication of slot-waveguide-based sensors
Grégory Pandraud*, Agung Purniawan, Eduardo Margallo-Balbás, Pasqualina M. Sarro
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review