A comparison between PECVD and ALD for the fabrication of slot-waveguide-based sensors
- Grégory Pandraud*
- , Agung Purniawan
- , Eduardo Margallo-Balbás
- , Pasqualina M. Sarro
*Corresponding author for this work
- Delft University of Technology
- Medlumics
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review