Active control of a pneumatic vibration isolation table using a newly developed precise and high response pressure regulator

Tomonori Kato*, Kenji Kawashima, Tatsuya Funaki, Harus Laksana Gunter, Toshiharu Kagawa

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Citations (Scopus)

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