@inproceedings{36c98f8bbb3f4694a9b8a28d7a7428b7,
title = "All ALD TiO 2-Al 2O 3-TiO 2 horizontal slot waveguides for optical sensing",
abstract = "We report for the first time on the use of Atomic Layer Deposition (ALD) to produce TiO 2-AlO 3-TiO 2 horizontal slot waveguides optical sensors. The propagation losses of the waveguides are measured and found to be 18 dB/cm for the quasi-TM mode. These losses are better than the losses reported in slot waveguides made using PECVD techniques (for materials like SiC of similar refractive index as TiO 2) with the advantage of a very accurate layer thickness control thanks to the ALD process and the possibility to decrease by a factor 3 the slot size. The field being so confined in the slot we investigated allows the implementation of these slots in a cantilever based sensor. A sensitivity of 0.5 dB/nm is reported.",
author = "A. Purniawan and French, {P. J.} and G. Pandraud and Y. Huang and Sarro, {P. M.}",
year = "2011",
doi = "10.1109/ICSENS.2011.6127051",
language = "English",
isbn = "9781424492886",
series = "Proceedings of IEEE Sensors",
pages = "1954--1957",
booktitle = "IEEE Sensors 2011 Conference, SENSORS 2011",
note = "10th IEEE SENSORS Conference 2011, SENSORS 2011 ; Conference date: 28-10-2011 Through 31-10-2011",
}