An investigation on ALD thin film evanescent waveguide sensor for biomedical application

Agung Purniawan; Paddy French; Gregory Pandraud; Pasqualina M. Sarro

doi:10.1007/978-3-642-18472-7_15

An investigation on ALD thin film evanescent waveguide sensor for biomedical application

Agung Purniawan^*, Paddy French, Gregory Pandraud, Pasqualina M. Sarro

^*Corresponding author for this work

Delft University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

In this paper, we investigate the use of Al₂O₃ and TiO₂ deposited by Atomic Layer Deposition (ALD) as evanescent waveguide sensors. These sensors will be employed to detect bacteria concentration in drain fluid in post anastomosis surgery. Surface roughness, conformality, and homogeneity of the sensor material are very important factors to obtain high sensitive sensor. ALD fulfill these requirements. Surface roughness before and after fabrication are investigated using AFM. As we aim at freestanding structure the buckling of freestanding ALD films is studied. Finally we build an optical characterization set up and measured the propagation loss of Al₂O₃ and TiO₂ waveguides at 1.3 um. The results show that ALD thin films can be used as waveguide material to obtain very high sensitive sensors.

Original language	English
Title of host publication	Biomedical Engineering Systems and Technologies - Third International Joint Conference, BIOSTEC 2010, Revised Selected Papers
Pages	189-196
Number of pages	8
DOIs	https://doi.org/10.1007/978-3-642-18472-7_15
Publication status	Published - 2011
Externally published	Yes
Event	3rd International Joint Conference on Biomedical Engineering Systems and Technologies, BIOSTEC 2010 - Valencia, Spain Duration: 20 Jan 2010 → 23 Jan 2010

Publication series

Name	Communications in Computer and Information Science
Volume	127 CCIS
ISSN (Print)	1865-0929

Conference

Conference	3rd International Joint Conference on Biomedical Engineering Systems and Technologies, BIOSTEC 2010
Country/Territory	Spain
City	Valencia
Period	20/01/10 → 23/01/10

Keywords

Atomic layer deposition
Evanescent waveguide
Propagation loss

Access to Document

10.1007/978-3-642-18472-7_15

Cite this

Purniawan, A., French, P., Pandraud, G., & Sarro, P. M. (2011). An investigation on ALD thin film evanescent waveguide sensor for biomedical application. In Biomedical Engineering Systems and Technologies - Third International Joint Conference, BIOSTEC 2010, Revised Selected Papers (pp. 189-196). (Communications in Computer and Information Science; Vol. 127 CCIS). https://doi.org/10.1007/978-3-642-18472-7_15

@inproceedings{6ceaef03240d43cf94c9bb8e27ce2ab0,

title = "An investigation on ALD thin film evanescent waveguide sensor for biomedical application",

abstract = "In this paper, we investigate the use of Al2O3 and TiO2 deposited by Atomic Layer Deposition (ALD) as evanescent waveguide sensors. These sensors will be employed to detect bacteria concentration in drain fluid in post anastomosis surgery. Surface roughness, conformality, and homogeneity of the sensor material are very important factors to obtain high sensitive sensor. ALD fulfill these requirements. Surface roughness before and after fabrication are investigated using AFM. As we aim at freestanding structure the buckling of freestanding ALD films is studied. Finally we build an optical characterization set up and measured the propagation loss of Al2O3 and TiO2 waveguides at 1.3 um. The results show that ALD thin films can be used as waveguide material to obtain very high sensitive sensors.",

keywords = "Atomic layer deposition, Evanescent waveguide, Propagation loss",

author = "Agung Purniawan and Paddy French and Gregory Pandraud and Sarro, {Pasqualina M.}",

year = "2011",

doi = "10.1007/978-3-642-18472-7_15",

language = "English",

isbn = "9783642184710",

series = "Communications in Computer and Information Science",

pages = "189--196",

booktitle = "Biomedical Engineering Systems and Technologies - Third International Joint Conference, BIOSTEC 2010, Revised Selected Papers",

note = "3rd International Joint Conference on Biomedical Engineering Systems and Technologies, BIOSTEC 2010 ; Conference date: 20-01-2010 Through 23-01-2010",

}

Purniawan, A, French, P, Pandraud, G & Sarro, PM 2011, An investigation on ALD thin film evanescent waveguide sensor for biomedical application. in Biomedical Engineering Systems and Technologies - Third International Joint Conference, BIOSTEC 2010, Revised Selected Papers. Communications in Computer and Information Science, vol. 127 CCIS, pp. 189-196, 3rd International Joint Conference on Biomedical Engineering Systems and Technologies, BIOSTEC 2010, Valencia, Spain, 20/01/10. https://doi.org/10.1007/978-3-642-18472-7_15

An investigation on ALD thin film evanescent waveguide sensor for biomedical application. / Purniawan, Agung; French, Paddy; Pandraud, Gregory et al.
Biomedical Engineering Systems and Technologies - Third International Joint Conference, BIOSTEC 2010, Revised Selected Papers. 2011. p. 189-196 (Communications in Computer and Information Science; Vol. 127 CCIS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - An investigation on ALD thin film evanescent waveguide sensor for biomedical application

AU - Purniawan, Agung

AU - French, Paddy

AU - Pandraud, Gregory

AU - Sarro, Pasqualina M.

PY - 2011

Y1 - 2011

N2 - In this paper, we investigate the use of Al2O3 and TiO2 deposited by Atomic Layer Deposition (ALD) as evanescent waveguide sensors. These sensors will be employed to detect bacteria concentration in drain fluid in post anastomosis surgery. Surface roughness, conformality, and homogeneity of the sensor material are very important factors to obtain high sensitive sensor. ALD fulfill these requirements. Surface roughness before and after fabrication are investigated using AFM. As we aim at freestanding structure the buckling of freestanding ALD films is studied. Finally we build an optical characterization set up and measured the propagation loss of Al2O3 and TiO2 waveguides at 1.3 um. The results show that ALD thin films can be used as waveguide material to obtain very high sensitive sensors.

AB - In this paper, we investigate the use of Al2O3 and TiO2 deposited by Atomic Layer Deposition (ALD) as evanescent waveguide sensors. These sensors will be employed to detect bacteria concentration in drain fluid in post anastomosis surgery. Surface roughness, conformality, and homogeneity of the sensor material are very important factors to obtain high sensitive sensor. ALD fulfill these requirements. Surface roughness before and after fabrication are investigated using AFM. As we aim at freestanding structure the buckling of freestanding ALD films is studied. Finally we build an optical characterization set up and measured the propagation loss of Al2O3 and TiO2 waveguides at 1.3 um. The results show that ALD thin films can be used as waveguide material to obtain very high sensitive sensors.

KW - Atomic layer deposition

KW - Evanescent waveguide

KW - Propagation loss

UR - http://www.scopus.com/inward/record.url?scp=79952517073&partnerID=8YFLogxK

U2 - 10.1007/978-3-642-18472-7_15

DO - 10.1007/978-3-642-18472-7_15

M3 - Conference contribution

AN - SCOPUS:79952517073

SN - 9783642184710

T3 - Communications in Computer and Information Science

SP - 189

EP - 196

BT - Biomedical Engineering Systems and Technologies - Third International Joint Conference, BIOSTEC 2010, Revised Selected Papers

T2 - 3rd International Joint Conference on Biomedical Engineering Systems and Technologies, BIOSTEC 2010

Y2 - 20 January 2010 through 23 January 2010

ER -

Purniawan A, French P, Pandraud G, Sarro PM. An investigation on ALD thin film evanescent waveguide sensor for biomedical application. In Biomedical Engineering Systems and Technologies - Third International Joint Conference, BIOSTEC 2010, Revised Selected Papers. 2011. p. 189-196. (Communications in Computer and Information Science). doi: 10.1007/978-3-642-18472-7_15

An investigation on ALD thin film evanescent waveguide sensor for biomedical application

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