Ultrasonic spray pyrolysis has been well-known process for producing fine particles from single and multicomponent materials. Here, the effect of carrier gas flow rate in ultrasonic spray pyrolysis process was studied in the particle formation of hydroxyapatite using solution precursor of Ca(CH3COO)2 and (NH4)2HPO4 with Ca/P ratio of 1.67. The experimental analysis was accompanied with computational fluid dynamics (CFD) simulation for comparison. In the simulation, the evaporation of the solvent in the droplets, a second evaporation due to crust formation, the decomposition reaction of the precursor involving the transfer of heat and mass transfer from droplet to surrounding were considered. By maintaining temperature at 900 °C, the residence time increased with decreasing the carrier gas flow rate led to the increasing the evaporation rate and the reacted fraction of the precursor. The predicted and experimental results of average particles size were agreed well with discrepancy 6.3%.