TY - GEN
T1 - EBX AND MASS-TRANSPORT TECHNIQUES FOR PHASE-SHIFTED DFB LASER.
AU - Koentjoro, Sekartedjo
AU - Eda, Norikazu
AU - Furuya, Kazuhito
AU - Suematsu, Yasuharu
PY - 1985
Y1 - 1985
N2 - A method for fabricating a phase-shifted DFB laser is presented. The method is a combination between the use of electron beam lithography method for fabrication of corrugation with desired phase-shift and mass-transport technique for reduction of threshold current and facet reflectivity. Low threshold current and stable single mode operation at the Bragg wavelength was measured. This method is convenient since less-complex processes were involved.
AB - A method for fabricating a phase-shifted DFB laser is presented. The method is a combination between the use of electron beam lithography method for fabrication of corrugation with desired phase-shift and mass-transport technique for reduction of threshold current and facet reflectivity. Low threshold current and stable single mode operation at the Bragg wavelength was measured. This method is convenient since less-complex processes were involved.
UR - http://www.scopus.com/inward/record.url?scp=0022231613&partnerID=8YFLogxK
U2 - 10.7567/ssdm.1985.b-1-5
DO - 10.7567/ssdm.1985.b-1-5
M3 - Conference contribution
AN - SCOPUS:0022231613
SN - 4930813107
SN - 9784930813107
T3 - Conference on Solid State Devices and Materials
SP - 75
EP - 78
BT - Conference on Solid State Devices and Materials
PB - Japan Soc of Applied Physics
ER -