TY - GEN
T1 - Encapsulated Aluminum Nitride SAW devices for liquid sensing applications
AU - Tran, A. T.
AU - Pandraud, G.
AU - Moh, T. S.Y.
AU - Schellevis, H.
AU - Sarro, P. M.
AU - Akhnoukh, A.
AU - Purniawan, A.
PY - 2012
Y1 - 2012
N2 - Very low-stress and good crystallinity Aluminum Nitride (AlN) thin films deposited on (100) Silicon substrates are optimized for surface acoustic wave (SAW) devices. We developed a simplified process to fabricate AlN SAW devices suitable for fast screening of liquid substances as needed for health and environmental monitoring. By encapsulating the interdigital transducer (IDT) with a very thin SiN layer, a sufficiently large sensing area is available between the electrodes. This allows direct and fast loading of the liquid drops on the device surface as well as cleaning, for repeated use. Moreover, the amount of layers on top of the piezoelectric AlN is minimized to avoid reduction of the signal. The fabricated devices are tested by using different buffer solutions typical in biological research (NaCl and phosphate buffered saline) and the possibility to operate these SAW devices for liquid sensors is demonstrated.
AB - Very low-stress and good crystallinity Aluminum Nitride (AlN) thin films deposited on (100) Silicon substrates are optimized for surface acoustic wave (SAW) devices. We developed a simplified process to fabricate AlN SAW devices suitable for fast screening of liquid substances as needed for health and environmental monitoring. By encapsulating the interdigital transducer (IDT) with a very thin SiN layer, a sufficiently large sensing area is available between the electrodes. This allows direct and fast loading of the liquid drops on the device surface as well as cleaning, for repeated use. Moreover, the amount of layers on top of the piezoelectric AlN is minimized to avoid reduction of the signal. The fabricated devices are tested by using different buffer solutions typical in biological research (NaCl and phosphate buffered saline) and the possibility to operate these SAW devices for liquid sensors is demonstrated.
UR - http://www.scopus.com/inward/record.url?scp=84873968905&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2012.6411392
DO - 10.1109/ICSENS.2012.6411392
M3 - Conference contribution
AN - SCOPUS:84873968905
SN - 9781457717659
T3 - Proceedings of IEEE Sensors
BT - IEEE SENSORS 2012 - Proceedings
T2 - 11th IEEE SENSORS 2012 Conference
Y2 - 28 October 2012 through 31 October 2012
ER -