Fabrication and characterization of interdigital capacitors thin film by DC magnetron sputtering for measuring the permittivity of crude oil

Risse Entikaria Rachmanita; Melania Suweni Muntini; Somphorn Thawankaew; Watchara Chao-Moo; Athorn Vora-Ud; Tosawat Seetawan

doi:10.1016/j.matpr.2018.04.081

Fabrication and characterization of interdigital capacitors thin film by DC magnetron sputtering for measuring the permittivity of crude oil

Risse Entikaria Rachmanita^*
, Melania Suweni Muntini
, Somphorn Thawankaew
, Watchara Chao-Moo
, Athorn Vora-Ud
, Tosawat Seetawan

^*Corresponding author for this work

Laboratory of Instrumentation

Institut Teknologi Sepuluh Nopember
Sakon Nakhon Rajabhat University

Research output: Contribution to journal › Conference article › peer-review

5 Citations (Scopus)

Abstract

The Interdigital Capacitors (IDCs) are integrated circuits within metal fingers electrode for measurement of specific properties. A new model has been carried out for fabrication and characterization of silver and copper thin film electrode of IDCs for the measurement of crude oil permittivity. Thin film electrode was fabricated by Direct Current (DC) Magnetron Sputtering method using silver and copper target on Flame Resistant (FR)-4 Printed Circuit Board (PCB). The electrode configuration was composed in seven designs.The experimental results show that, IDCs thin film has a great potential to determine the permittivity of crude oil.

Original language	English
Pages (from-to)	15192-15197
Number of pages	6
Journal	Materials Today: Proceedings
Volume	5
Issue number	7
DOIs	https://doi.org/10.1016/j.matpr.2018.04.081
Publication status	Published - 2018
Event	3rd International Conference on Applied Physics and Materials Applications, ICAPMA 2017 - Pattaya, Thailand Duration: 31 May 2017 → 2 Jun 2017

Keywords

Crude oil
DC magnetron sputtering
Interdigital capacitors
Permittivity
Thin film

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10.1016/j.matpr.2018.04.081

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@article{b8168f71cad74aeeb1985265e9e905d7,

title = "Fabrication and characterization of interdigital capacitors thin film by DC magnetron sputtering for measuring the permittivity of crude oil",

abstract = "The Interdigital Capacitors (IDCs) are integrated circuits within metal fingers electrode for measurement of specific properties. A new model has been carried out for fabrication and characterization of silver and copper thin film electrode of IDCs for the measurement of crude oil permittivity. Thin film electrode was fabricated by Direct Current (DC) Magnetron Sputtering method using silver and copper target on Flame Resistant (FR)-4 Printed Circuit Board (PCB). The electrode configuration was composed in seven designs.The experimental results show that, IDCs thin film has a great potential to determine the permittivity of crude oil.",

keywords = "Crude oil, DC magnetron sputtering, Interdigital capacitors, Permittivity, Thin film",

author = "\{Entikaria Rachmanita\}, Risse and \{Suweni Muntini\}, Melania and Somphorn Thawankaew and Watchara Chao-Moo and Athorn Vora-Ud and Tosawat Seetawan",

note = "Publisher Copyright: {\textcopyright} 2018 Elsevier Ltd. All rights reserved.; 3rd International Conference on Applied Physics and Materials Applications, ICAPMA 2017 ; Conference date: 31-05-2017 Through 02-06-2017",

year = "2018",

doi = "10.1016/j.matpr.2018.04.081",

language = "English",

volume = "5",

pages = "15192--15197",

journal = "Materials Today: Proceedings",

issn = "2214-7853",

publisher = "Elsevier Ltd.",

number = "7",

}

Fabrication and characterization of interdigital capacitors thin film by DC magnetron sputtering for measuring the permittivity of crude oil. / Entikaria Rachmanita, Risse; Suweni Muntini, Melania; Thawankaew, Somphorn et al.
In: Materials Today: Proceedings, Vol. 5, No. 7, 2018, p. 15192-15197.

Research output: Contribution to journal › Conference article › peer-review

TY - JOUR

T1 - Fabrication and characterization of interdigital capacitors thin film by DC magnetron sputtering for measuring the permittivity of crude oil

AU - Entikaria Rachmanita, Risse

AU - Suweni Muntini, Melania

AU - Thawankaew, Somphorn

AU - Chao-Moo, Watchara

AU - Vora-Ud, Athorn

AU - Seetawan, Tosawat

PY - 2018

Y1 - 2018

N2 - The Interdigital Capacitors (IDCs) are integrated circuits within metal fingers electrode for measurement of specific properties. A new model has been carried out for fabrication and characterization of silver and copper thin film electrode of IDCs for the measurement of crude oil permittivity. Thin film electrode was fabricated by Direct Current (DC) Magnetron Sputtering method using silver and copper target on Flame Resistant (FR)-4 Printed Circuit Board (PCB). The electrode configuration was composed in seven designs.The experimental results show that, IDCs thin film has a great potential to determine the permittivity of crude oil.

AB - The Interdigital Capacitors (IDCs) are integrated circuits within metal fingers electrode for measurement of specific properties. A new model has been carried out for fabrication and characterization of silver and copper thin film electrode of IDCs for the measurement of crude oil permittivity. Thin film electrode was fabricated by Direct Current (DC) Magnetron Sputtering method using silver and copper target on Flame Resistant (FR)-4 Printed Circuit Board (PCB). The electrode configuration was composed in seven designs.The experimental results show that, IDCs thin film has a great potential to determine the permittivity of crude oil.

KW - Crude oil

KW - DC magnetron sputtering

KW - Interdigital capacitors

KW - Permittivity

KW - Thin film

UR - https://www.scopus.com/pages/publications/85062706734

U2 - 10.1016/j.matpr.2018.04.081

DO - 10.1016/j.matpr.2018.04.081

M3 - Conference article

AN - SCOPUS:85062706734

SN - 2214-7853

VL - 5

SP - 15192

EP - 15197

JO - Materials Today: Proceedings

JF - Materials Today: Proceedings

IS - 7

T2 - 3rd International Conference on Applied Physics and Materials Applications, ICAPMA 2017

Y2 - 31 May 2017 through 2 June 2017

ER -

Fabrication and characterization of interdigital capacitors thin film by DC magnetron sputtering for measuring the permittivity of crude oil

Abstract

Keywords

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