TY - GEN
T1 - Fabrication of amorphous carbon thin film from ch4 using pevcd
AU - Priyanto, Budhi
AU - Saleh, Muh
AU - Tunmee, Sarayut
AU - Euaruksakul, Chanan
AU - Cahyono, Yoyok
AU - Triwikantoro,
AU - Darminto,
N1 - Publisher Copyright:
© 2019 Trans Tech Publications Ltd, Switzerland.
PY - 2019
Y1 - 2019
N2 - Thin films of amorphous carbon have been successfully fabricated by radio frequency-plasma enhanced chemical vapor deposition (RF-PECVD). Carbon film preparation with a methane gas (CH4) source has been fabricated with deposition parameters: RF power of 15 Watt, frequency of 13.5 MHz, substrate temperature of 1000 C, pressure of 450 mTorr, and deposition time of 120 minutes. Methane gas flows were 40, 60, 80 sccm. The thin film can be in the form of Diamond Like Carbon (DLC), Graphite or Amorphous Carbon depending on the ratio of hybridized orbitals of sp3, sp2 and sp. The X-ray diffractrometry (XRD) patterns show the amorphous carbon phase has been formed in the thin film. Further analysis using Fourier transform infrared (FTIR) combined with synchrotron photoemission spectroscopy (PES) showed that the sp3 hybridization was more dominant than sp2. This gives an indication that as fabricated thin films are tetrahedrally amorphous carbon (ta-C).
AB - Thin films of amorphous carbon have been successfully fabricated by radio frequency-plasma enhanced chemical vapor deposition (RF-PECVD). Carbon film preparation with a methane gas (CH4) source has been fabricated with deposition parameters: RF power of 15 Watt, frequency of 13.5 MHz, substrate temperature of 1000 C, pressure of 450 mTorr, and deposition time of 120 minutes. Methane gas flows were 40, 60, 80 sccm. The thin film can be in the form of Diamond Like Carbon (DLC), Graphite or Amorphous Carbon depending on the ratio of hybridized orbitals of sp3, sp2 and sp. The X-ray diffractrometry (XRD) patterns show the amorphous carbon phase has been formed in the thin film. Further analysis using Fourier transform infrared (FTIR) combined with synchrotron photoemission spectroscopy (PES) showed that the sp3 hybridization was more dominant than sp2. This gives an indication that as fabricated thin films are tetrahedrally amorphous carbon (ta-C).
KW - Amorphous carbon
KW - Methane gas
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=85071907182&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.966.95
DO - 10.4028/www.scientific.net/MSF.966.95
M3 - Conference contribution
AN - SCOPUS:85071907182
SN - 9783035714968
T3 - Materials Science Forum
SP - 95
EP - 99
BT - Functional Properties of Modern Materials II
A2 - Darminto, null
A2 - Kurniawan, Budhy
A2 - Risdiana, null
A2 - Watanabe, Isao
A2 - Nugroho, Agustinus Agung
PB - Trans Tech Publications Ltd
T2 - 4th International Conference on Functional Materials Science, ICFMS 2018
Y2 - 13 November 2018 through 15 November 2018
ER -