This study focused on because increase contact resistance value then analyze use Failure Mode Effect Analyze (FMEA) with Risk Priority Number (RPN) calculation. Where there is ten step analysis FMEA from beginning determination 4 “cause effect” until determination change circuit breaker (CB) in Extra High Voltage Substation (GITET) 500kV Krian. After that it produces a worksheet to make it easier to check maintain and analyze failures on the CB with a numerical scale. It is a method of reasoning the impact of all possible failures that result increase contact resistance. The cause-effect is the main test performed is the synchronization test when opened/closed. In addition, there are 3 other cause effects, equipment life, thermovision, and visual inspection. After testing and analysis, it was found that the value of contact resistance on CB 7B2 increased with an increase in the value of contact resistance in the R phase of 19.7 µΩ, the S phase of 4.8 µΩ, and the T phase of 6.9 µΩ. Testing of the four cause effects was then analyzed using the FMEA method with the results that of the four cause effects, the one that had the most influence on the increase in the value of contact resistance was thermovision with a Risk Priority Number (RPN) value of 280. After that analyze the comparison of contact resistance value with temperature (thermovision) and open/close circuit breaker (synchronization test).