TY - JOUR
T1 - Morphological and optical properties of tin oxide nanomaterial thin film deposited using vacuum evaporation
AU - Khoiro, Muhimmatul
AU - Hashishin, Takeshi
AU - Muntini, Melania Suweni
AU - Pramono, Yono Hadi
N1 - Publisher Copyright:
© 2020 The Ceramic Society of Japan. All rights reserved.
PY - 2020
Y1 - 2020
N2 - A 250nm thick pure tin film was deposited on quartz substrates by vacuum evaporation of 99.9%pure tin metal. The films were heated in a two-step annealing sequence for 3 h at 200 and 3 h at 400 °C with an electric furnace to decrease their surface roughness. This process transformed the films into tin(II) oxide. Subsequently, the films were annealed at five temperatures for 3 h each: 600, 700, 800, 900 and 1000 °C. The crystal structure of the film on the quartz substrate was completely transformed into SnO2 at 600 °C. With the increase of annealing temperature to 1000 °C, the size of the lattices appeared to decrease on the thin film. In addition, the annealing process led to the formation of pores on the surface, but the number of pores and the lattices volume decreased with increased annealing temperature. The optical properties of the thin film were characterized by the use of visible spectrophotometry which showed a high refractive index at around 2.082.27. Interestingly, the SnO2 thin film with the highest refractive index at 2.27, which was obtained at 1000 °C, exhibited the lowest Urbach energy. Therefore, the SnO2 thin film has a high potential for optical applications, especially in dielectric waveguides and solar cells.
AB - A 250nm thick pure tin film was deposited on quartz substrates by vacuum evaporation of 99.9%pure tin metal. The films were heated in a two-step annealing sequence for 3 h at 200 and 3 h at 400 °C with an electric furnace to decrease their surface roughness. This process transformed the films into tin(II) oxide. Subsequently, the films were annealed at five temperatures for 3 h each: 600, 700, 800, 900 and 1000 °C. The crystal structure of the film on the quartz substrate was completely transformed into SnO2 at 600 °C. With the increase of annealing temperature to 1000 °C, the size of the lattices appeared to decrease on the thin film. In addition, the annealing process led to the formation of pores on the surface, but the number of pores and the lattices volume decreased with increased annealing temperature. The optical properties of the thin film were characterized by the use of visible spectrophotometry which showed a high refractive index at around 2.082.27. Interestingly, the SnO2 thin film with the highest refractive index at 2.27, which was obtained at 1000 °C, exhibited the lowest Urbach energy. Therefore, the SnO2 thin film has a high potential for optical applications, especially in dielectric waveguides and solar cells.
KW - Nanomaterial
KW - Optoelectronics application
KW - Thin films
KW - Tin oxide
KW - Vacuum evaporation
UR - http://www.scopus.com/inward/record.url?scp=85081673958&partnerID=8YFLogxK
U2 - 10.2109/jcersj2.19159
DO - 10.2109/jcersj2.19159
M3 - Article
AN - SCOPUS:85081673958
SN - 1882-0743
VL - 128
SP - 158
EP - 163
JO - Journal of the Ceramic Society of Japan
JF - Journal of the Ceramic Society of Japan
IS - 3
ER -