Study on fabrication of TiO2 thin films by spin-coating and their optical properties

Vicran Zharvan; Risqa Daniyati; A. S. Nur Ichzan; Gatut Yudoyono

doi:10.1063/1.4943713

Study on fabrication of TiO₂ thin films by spin-coating and their optical properties

Vicran Zharvan, Risqa Daniyati, A. S. Nur Ichzan, Gatut Yudoyono, Darminto

Institut Teknologi Sepuluh Nopember

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

13 Citations (Scopus)

Abstract

Study on fabrication of TiO₂ thin films and their optical properties in UV-VIS spectrum has been conducted. TiO₂ nanopowders were prepared by co-precipitation method with varying mixing duration for 5, 10 and 25 hours using TiCl₃ as precursor. The as-synthesized TiO₂ phase is anatase having crystalline size of 14.25nm, 13.75nm and 12.62, respectively for the corresponding mixing duration. Thin films of TiO₂ were fabricated by spin coating method and then checked by XRD diffractometer and UV-Vis Spectrophotometer to examine their structure and band gap energy. The prepared films also contain anatase phase of TiO₂ with respective band gap of 3.70 eV, 3.74 eV and 3.76 eV, depending on the powders and their treatment.

Original language	English
Title of host publication	4th International Conference on Theoretical and Applied Physics, ICTAP 2014
Editors	Ni Nyoman Rupiasih, Wayan Gede Suharta, Hery Suyanto
Publisher	American Institute of Physics Inc.
ISBN (Electronic)	9780735413665
DOIs	https://doi.org/10.1063/1.4943713
Publication status	Published - 11 Mar 2016
Event	4th International Conference on Theoretical and Applied Physics, ICTAP 2014 - Bali, Indonesia Duration: 16 Oct 2014 → 17 Oct 2014

Publication series

Name	AIP Conference Proceedings
Volume	1719
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Conference

Conference	4th International Conference on Theoretical and Applied Physics, ICTAP 2014
Country/Territory	Indonesia
City	Bali
Period	16/10/14 → 17/10/14

Keywords

TiO
UV-Vis
XRD
anatase
band gap
thin films

Access to Document

10.1063/1.4943713

Cite this

Zharvan, V., Daniyati, R., Nur Ichzan, A. S., Yudoyono, G., & Darminto (2016). Study on fabrication of TiO₂ thin films by spin-coating and their optical properties. In N. N. Rupiasih, W. G. Suharta, & H. Suyanto (Eds.), 4th International Conference on Theoretical and Applied Physics, ICTAP 2014 Article 30018 (AIP Conference Proceedings; Vol. 1719). American Institute of Physics Inc.. https://doi.org/10.1063/1.4943713

@inproceedings{022a0d23ca784323b67e5e088f578b16,

title = "Study on fabrication of TiO2 thin films by spin-coating and their optical properties",

abstract = "Study on fabrication of TiO2 thin films and their optical properties in UV-VIS spectrum has been conducted. TiO2 nanopowders were prepared by co-precipitation method with varying mixing duration for 5, 10 and 25 hours using TiCl3 as precursor. The as-synthesized TiO2 phase is anatase having crystalline size of 14.25nm, 13.75nm and 12.62, respectively for the corresponding mixing duration. Thin films of TiO2 were fabricated by spin coating method and then checked by XRD diffractometer and UV-Vis Spectrophotometer to examine their structure and band gap energy. The prepared films also contain anatase phase of TiO2 with respective band gap of 3.70 eV, 3.74 eV and 3.76 eV, depending on the powders and their treatment.",

keywords = "TiO, UV-Vis, XRD, anatase, band gap, thin films",

author = "Vicran Zharvan and Risqa Daniyati and {Nur Ichzan}, {A. S.} and Gatut Yudoyono and Darminto",

note = "Publisher Copyright: {\textcopyright} 2016 AIP Publishing LLC.; 4th International Conference on Theoretical and Applied Physics, ICTAP 2014 ; Conference date: 16-10-2014 Through 17-10-2014",

year = "2016",

month = mar,

day = "11",

doi = "10.1063/1.4943713",

language = "English",

series = "AIP Conference Proceedings",

publisher = "American Institute of Physics Inc.",

editor = "Rupiasih, {Ni Nyoman} and Suharta, {Wayan Gede} and Hery Suyanto",

booktitle = "4th International Conference on Theoretical and Applied Physics, ICTAP 2014",

}

Zharvan, V, Daniyati, R, Nur Ichzan, AS, Yudoyono, G & Darminto 2016, Study on fabrication of TiO₂ thin films by spin-coating and their optical properties. in NN Rupiasih, WG Suharta & H Suyanto (eds), 4th International Conference on Theoretical and Applied Physics, ICTAP 2014., 30018, AIP Conference Proceedings, vol. 1719, American Institute of Physics Inc., 4th International Conference on Theoretical and Applied Physics, ICTAP 2014, Bali, Indonesia, 16/10/14. https://doi.org/10.1063/1.4943713

Study on fabrication of TiO₂ thin films by spin-coating and their optical properties. / Zharvan, Vicran; Daniyati, Risqa; Nur Ichzan, A. S. et al.
4th International Conference on Theoretical and Applied Physics, ICTAP 2014. ed. / Ni Nyoman Rupiasih; Wayan Gede Suharta; Hery Suyanto. American Institute of Physics Inc., 2016. 30018 (AIP Conference Proceedings; Vol. 1719).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Study on fabrication of TiO2 thin films by spin-coating and their optical properties

AU - Zharvan, Vicran

AU - Daniyati, Risqa

AU - Nur Ichzan, A. S.

AU - Yudoyono, Gatut

AU - Darminto,

PY - 2016/3/11

Y1 - 2016/3/11

N2 - Study on fabrication of TiO2 thin films and their optical properties in UV-VIS spectrum has been conducted. TiO2 nanopowders were prepared by co-precipitation method with varying mixing duration for 5, 10 and 25 hours using TiCl3 as precursor. The as-synthesized TiO2 phase is anatase having crystalline size of 14.25nm, 13.75nm and 12.62, respectively for the corresponding mixing duration. Thin films of TiO2 were fabricated by spin coating method and then checked by XRD diffractometer and UV-Vis Spectrophotometer to examine their structure and band gap energy. The prepared films also contain anatase phase of TiO2 with respective band gap of 3.70 eV, 3.74 eV and 3.76 eV, depending on the powders and their treatment.

AB - Study on fabrication of TiO2 thin films and their optical properties in UV-VIS spectrum has been conducted. TiO2 nanopowders were prepared by co-precipitation method with varying mixing duration for 5, 10 and 25 hours using TiCl3 as precursor. The as-synthesized TiO2 phase is anatase having crystalline size of 14.25nm, 13.75nm and 12.62, respectively for the corresponding mixing duration. Thin films of TiO2 were fabricated by spin coating method and then checked by XRD diffractometer and UV-Vis Spectrophotometer to examine their structure and band gap energy. The prepared films also contain anatase phase of TiO2 with respective band gap of 3.70 eV, 3.74 eV and 3.76 eV, depending on the powders and their treatment.

KW - TiO

KW - UV-Vis

KW - XRD

KW - anatase

KW - band gap

KW - thin films

UR - http://www.scopus.com/inward/record.url?scp=84984538836&partnerID=8YFLogxK

U2 - 10.1063/1.4943713

DO - 10.1063/1.4943713

M3 - Conference contribution

AN - SCOPUS:84984538836

T3 - AIP Conference Proceedings

BT - 4th International Conference on Theoretical and Applied Physics, ICTAP 2014

A2 - Rupiasih, Ni Nyoman

A2 - Suharta, Wayan Gede

A2 - Suyanto, Hery

PB - American Institute of Physics Inc.

T2 - 4th International Conference on Theoretical and Applied Physics, ICTAP 2014

Y2 - 16 October 2014 through 17 October 2014

ER -

Zharvan V, Daniyati R, Nur Ichzan AS, Yudoyono G , Darminto. Study on fabrication of TiO₂ thin films by spin-coating and their optical properties. In Rupiasih NN, Suharta WG, Suyanto H, editors, 4th International Conference on Theoretical and Applied Physics, ICTAP 2014. American Institute of Physics Inc. 2016. 30018. (AIP Conference Proceedings). doi: 10.1063/1.4943713