AgZn thin film was deposited on stainless steel 316L surface by Radio Frequency Physical Vapor Deposition (RF-PVD) as antimicrobial coating. The compositions of AgZn were varied using different surface area ratio with mosaic method. In this research, the surface ratio of Ag/Zn target materials were varied from 95/5 to 80/20. The influence of surface area ratio of target material to the thin film composition, thickness, roughness and inhibition properties were investigated. X-ray Diffraction and EDX were used to measure the composition of the thin film. SEM and AFM were used to analize cross section and topography of the thin film, respectively. Inhibition performance analysis was carried out using Kirby Bauer method using E. Coli bacteria in agar medium.

Original languageEnglish
Title of host publicationSeminar on Materials Science and Technology
EditorsLukman Noerochim
PublisherTrans Tech Publications Ltd
Number of pages5
ISBN (Print)9783035714340
Publication statusPublished - 2019
Event4th International Seminar on Science and Technology, ISST 2018 - Surabaya, Indonesia
Duration: 9 Aug 20189 Aug 2018

Publication series

NameMaterials Science Forum
Volume964 MSF
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752


Conference4th International Seminar on Science and Technology, ISST 2018


  • Ag-Zn
  • Antimicrobial
  • RF-PVD Deposition
  • Stainless steel 316L
  • Surface area ration


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