The Effect of Titanium Nitride Thickness as a Support Layer for Carbon Nanotubes Growth

Muhammad M. Ramli*, N. H. Osman, D. Darminto, M. M.A.B. Abdullah

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

The effect of titanium nitride (TiN) thickness as the support layer for carbon nanotubes (CNTs) growth was investigated by depositing three different thicknesses: 20 nm, 50 nm and 100 nm. This TiN support layer was deposited on SiO2 pads before depositing nickel (Ni) as the catalyst material. The Ni distribution on different TiN thicknesses was studied under hydrogen environment at 600°C. Then, the samples were further annealed at 600°C in acetylene and hydrogen environment for CNTs growth. The results show that, the optimum TiN thickness was obtained for 50 nm attributed by the lowest D to G ratio (0.8).

Original languageEnglish
Pages (from-to)963-966
Number of pages4
JournalArchives of Metallurgy and Materials
Volume67
Issue number3
DOIs
Publication statusPublished - 2022

Keywords

  • Carbon Nanotubes
  • Interconnection
  • Support Layer
  • Titanium Nitride

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